Emission characteristics and dynamics of neutral species in a laser-produced tin plasma
نویسندگان
چکیده
We investigated the emission features of tin neutrals in a laser-ablated tin plasma using time and space resolved optical emission spectroscopy. The tin plume was generated by focusing 1064 nm, 10 ns pulses from a Nd : YAG laser on a tin slab target placed in a vacuum chamber. We examined the properties of the tin neutrals at various spatial locations from the target surface and at different laser irradiance levels. The neutral tin particles were found to be moving with a velocity close to the expansion velocity of singly charged ions at shorter distances from the target surface while their velocity was considerably reduced at distances >5 mm. Spatially and temporally resolved emission studies also showed a double peak structure in the temporal profiles of excited neutral tin at shorter distances from the target surface. (Some figures in this article are in colour only in the electronic version)
منابع مشابه
The effect of laser wavelength on emission and particle dynamics of Sn plasma
We investigated the effects of laser wavelength on the atomic, ionic, and radiative emission from laser-produced tin plasmas. For generating plasmas, planar tin targets were excited using either high intensity neodymium-doped yttrium aluminum garnet Nd:YAG, 1.06 m or carbon dioxide CO2, 10.6 m laser pulses; both are considered to be potential excitation lasers for an extreme ultraviolet EUV lit...
متن کاملSpectroscopic Characterization of Indium-Tin Laser Ablated Plasma
In the present research work we present the optical emission studies of the Indium (In) – Tin (Sn) plasma produced by the first (1064 nm) harmonic of an Nd: YAG nanosecond pulsed laser. The experimentally observed line profiles of neutral Indium (In I) and Tin (SnI) are used to extract the electron temperature (Te) using the Boltzmann plot method. Whereas, the electron number density (Ne) has b...
متن کاملComparative study on EUV and debris emission from CO2 and Nd: YAG laser-produced tin plasmas
The emission characteristics of debris from laser-produced tin plasma were investigated for an extreme ultraviolet lithography (EUV) light source. The ions and droplets emitted from tin plasma produced by a CO2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. A higher ion kinetic energy and a lower droplet emission were ob...
متن کاملEmission characteristics and dynamics of the stagnation layer in colliding laser produced plasmas
The expansion dynamics of ion and neutral species in laterally colliding laser produced aluminum plasmas have been investigated using time and space resolved optical emission spectroscopies and spectrally and angularly resolved fast imaging. The emission results highlight a difference in neutral atom and ion distributions in the stagnation layer where, at a time delay of 80 ns, the neutral atom...
متن کاملAngular distribution of debris from CO2 and YAG laser- produced tin plasmas
We investigated the angular dependence of atomic and ionic debris from CO2 and YAG laser-produced tin plasmas. Several diagnostic techniques were employed for this study including a Faraday cup, witness plates and subsequent x-ray photoelectron spectroscopic analysis, optical emission spectroscopy etc. It was found that the debris emission from the Nd:YAG laser-produced plasmas fell sharply fro...
متن کامل